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Catalyst

Purelyst PFC-101

Purelyst PFC-101

Products > Catalyst

PFCs decomposition catalyst

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Application

Application
Target gases PFCsa gases (CF4, C2F6, C3F8, NF3, SF6, etc.)
Characteristics Catalyst performance is stable to 850 oC.
Resistant to concentrated HF and SO2
CO is not emitted.
Specification of pellet and 3H type pellet can be adjustable.
Usage Semiconductor, Display fabs

a : Perfluorocompounds

Specification

Specification
Product Purelyst PFC-101
Shape Pellet 3H type pellet
Diametera (mm) 3 3
Lengtha (mm) 5~15 5~15
Apparent densitya (g/cm3) 0.85 0.80
Color Ivory Ivory

a : Adjustable

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