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Catalyst
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Purelyst PFC-101 Products > Catalyst
PFCs decomposition catalyst |
Application
| Target gases | PFCsa gases (CF4, C2F6, C3F8, NF3, SF6, etc.) |
|---|---|
| Characteristics | Catalyst performance is stable to 850 oC. Resistant to concentrated HF and SO2 CO is not emitted. Specification of pellet and 3H type pellet can be adjustable. |
| Usage | Semiconductor, Display fabs |
a : Perfluorocompounds
Specification
| Product | Purelyst PFC-101 | |
|---|---|---|
| Shape | Pellet | 3H type pellet |
| Diametera (mm) | 3 | 3 |
| Lengtha (mm) | 5~15 | 5~15 |
| Apparent densitya (g/cm3) | 0.85 | 0.80 |
| Color | Ivory | Ivory |
a : Adjustable
