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Purelyst PFC-101 Products > Catalyst
PFCs decomposition catalyst |
Target gases | PFCsa gases (CF4, C2F6, C3F8, NF3, SF6, etc.) |
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Characteristics | Catalyst performance is stable to 850 oC. Resistant to concentrated HF and SO2 CO is not emitted. Specification of pellet and 3H type pellet can be adjustable. |
Usage | Semiconductor, Display fabs |
a : Perfluorocompounds
Product | Purelyst PFC-101 | |
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Shape | Pellet | 3H type pellet |
Diametera (mm) | 3 | 3 |
Lengtha (mm) | 5~15 | 5~15 |
Apparent densitya (g/cm3) | 0.85 | 0.80 |
Color | Ivory | Ivory |
a : Adjustable