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Catalyst

Puresorb PFC-100

Puresorb PFC-100

Products > Catalyst

Catalytically active chemisorbent for PFCs

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Application

Application
Removal gas PFCa gases (CF4, C2F6, C3F8, NF3, SF6, etc.)
Characteristics PFCs removal : ≥ 98%
No emission of fluorocompounds, NOx and SOx
Thermally resistant
Usage Semiconductor and Display industries

a : Perfluorocompounds (which include perfluorocarbons)

Specification

Specification
Product Puresorb PFC-100
Shape Pellet
Diameter (mm) 3
Length (mm) 5~15
Apparent density (g/cm3) 1.40±0.10
Color Gray
PFCs removal capacity (L/L) Above 50


Operation condition

Operation condition
Gas Temperature (oC) Reaction mechanism
CF4 ≥ 550 CF4 + M → MFx + CO2
NF3 ≥ 350 NF3 + M-100 → MFx + N2
SF6 ≥ 550 SF6 + M → MxFy + M1-xSz


* M : Puresorb PFC-100