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Catalyst
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Puresorb PFC-100 Products > Catalyst
Catalytically active chemisorbent for PFCs |
Application
| Removal gas | PFCa gases (CF4, C2F6, C3F8, NF3, SF6, etc.) |
|---|---|
| Characteristics | PFCs removal : ≥ 98% No emission of fluorocompounds, NOx and SOx Thermally resistant |
| Usage | Semiconductor and Display industries |
a : Perfluorocompounds (which include perfluorocarbons)
Specification
| Product | Puresorb PFC-100 |
|---|---|
| Shape | Pellet |
| Diameter (mm) | 3 |
| Length (mm) | 5~15 |
| Apparent density (g/cm3) | 1.40±0.10 |
| Color | Gray |
| PFCs removal capacity (L/L) | Above 50 |
Operation condition
| Gas | Temperature (oC) | Reaction mechanism |
|---|---|---|
| CF4 | ≥ 550 | CF4 + M → MFx + CO2 |
| NF3 | ≥ 350 | NF3 + M-100 → MFx + N2 |
| SF6 | ≥ 550 | SF6 + M → MxFy + M1-xSz |
* M : Puresorb PFC-100
