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Puresorb PFC-100 Products > Catalyst
Catalytically active chemisorbent for PFCs |
Removal gas | PFCa gases (CF4, C2F6, C3F8, NF3, SF6, etc.) |
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Characteristics | PFCs removal : ≥ 98% No emission of fluorocompounds, NOx and SOx Thermally resistant |
Usage | Semiconductor and Display industries |
a : Perfluorocompounds (which include perfluorocarbons)
Product | Puresorb PFC-100 |
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Shape | Pellet |
Diameter (mm) | 3 |
Length (mm) | 5~15 |
Apparent density (g/cm3) | 1.40±0.10 |
Color | Gray |
PFCs removal capacity (L/L) | Above 50 |
Gas | Temperature (oC) | Reaction mechanism |
---|---|---|
CF4 | ≥ 550 | CF4 + M → MFx + CO2 |
NF3 | ≥ 350 | NF3 + M-100 → MFx + N2 |
SF6 | ≥ 550 | SF6 + M → MxFy + M1-xSz |
* M : Puresorb PFC-100