HOMER&DResearch Equipment
Research Equipment
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Toxic gas adsorption test unit
R&D > Research Equipment
Adsorption test of HCl, HF, PH3, SiH4 , etc.
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Subject
| Contents
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Equipment
| Toxic gas adsorption test unit
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Gas
| Cl2, HCl, HF, PH3, SiH4
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Gas control
| MFC
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Temperature
| RT~300 oC
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Detection
| Drag tube
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adsorption test unit
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