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Toxic gas adsorption test unit R&D > Research Equipment
Adsorption test of HCl, HF, PH3, SiH4 |
Subject | Contents |
Equipment | Toxic gas adsorption test unit |
Gas | Cl2, HCl, HF, PH3, SiH4 |
Gas control | MFC |
Temperature | RT~300 oC |
Detection | Drag tube |
