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HOMER&DResearch Equipment

Research Equipment

Toxic gas adsorption test unit

Toxic gas adsorption test unit

R&D > Research Equipment

Adsorption test of HCl, HF, PH3, SiH4 

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Subject

Contents

Equipment

Toxic gas adsorption test unit

Gas

Cl2, HCl, HF, PH3, SiH4

Gas control

MFC

Temperature

RT~300 oC

Detection

Drag tube