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Purelyst® PFC-101, 201

Overview

Purelyst® PFC-101, 201 온실가스, 제휴 시간(년), 지구온난화지수(GWP)에 관련된 표입니다.
Greenhouse gases Atmospheric life time (years) Global warming potential(GWP-100)
Carbon dioxide(CO2) - 1
Methane(CH4) 11.8 29.8
Nitrous oxide(N2O) 109 273
Perfluoromethane(CF4) 50,000 7,380
Nitrogen trifluoride(NF3) 569 17,400
Sulfur hexafluoride(SF6) 3,200 25,200

N2O and Perfluorocompounds (PFCs) such as CF4, NF3, SF6 are emitted in low amounts, but contribute significantly to global warming, making it necessary to remove them from industrial processes

Usage

Purelyst® PFC-101, 201 제품명, 제거대상, 반응메커니즘, 특징, 적용분야에 관련된 표
Product name Purelyst® PFC-101, 201
Removal method
  • N2O and PFCs (CF4, NF3, SF6, etc)
Response mechanisms
  • 2N2O + Catalyst* ▶ 2N2 + O2
  • CF4 + 2H2O + Catalyst* ▶ CO2 + 4HF
  • NF3 + H2O + Catalyst* ▶ a NO, b N2O, c NO2 + n HF
  • SF6 + 3H2O + Catalyst* ▶ SO2 + 6HF
Characteristics
  • Thermal durability up to 850°C
  • Maintains catalytic performance even in the presence of high concentrations of HF and SO2
  • Minimizes generation of F compound by-products
  • Can be shaped into pellets or trilobe forms
Applicable fields
  • Display process
  • Semiconductor process
  • Solar cell process

Specifications for bulk and honeycomb-shaped products

Purelyst® PFC-101 제품 명, 제거대상, 반응메커니즘, 특징, 적용분야에 관련된 표
Product name Purelyst® PFC-101, 201
Form Pellet, Trilobe, Honeycomb briquette
Charge density(g/cm3) 0.70±0.10
Compressive strength (N) characteristics > 30
BET(m2/g) > 150
Charge density(g/cm3) Below 3

Performance evaluation results

Categories, Condition, Unit 에 관련된 표
Categories Condition Unit
Type of catalyst Purelyst PFC-101, Trilobe, 11 MM -
GHSV 1,600 h-1
Linear velocity 0.044 m/sec
Voulme of catalyst 90 cm3
Reaction temperature 500~800 ℃
Total flow rate 2,400 cm3/min
Concentration of CF4 2,000 ppm
Concentration of O2 2 %
H2O/CF4 molar ratio 25 -
Categories, Condition, Unit 에 관련된 표
Categories Condition Unit
Type of catalyst Purelyst PFC-101, Granule, 10~16 mesh -
GHSV 1,600 h-1
Voulme of catalyst 39.2 cm3
Reaction temperature 750 ℃
Total flow rate 1,176 cm3/min
Concentration of CF4 6,040 ppm
Concentration of O2 21 %
H2O/CF4 molar ratio 25 -


Categories, Condition, Unit 에 관련된 표
Categories Condition Unit
Type of catalysts Trilobe, 11 mm -
GHSV 1,600 h-1
Voulme of catalyst 90 cm3
Reaction temperature 750 ℃
Total flow rate 2,400 cm3/min
Concentration of CF4 7,000 ppm
Concentration of N2O 1.8 %
H2O/CF4 molar ratio 25 -
Air Balance -

Product image

  • Pellet type
  • Trilobe type
  • Honeycomb briquette type
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