Purelyst® PFC-201 is a high-performance catalyst capable of decomposing more than 95% of both PFCs and N₂O, even in the presence of acidic gases such as HF and SO₂, as well as moisture and oxygen. The catalyst is available in various forms, including pellets and trilobes, to accommodate different process and equipment requirements.
     PFCs and N₂O are commonly generated during etching and chemical vapor deposition (CVD) processes in the display, semiconductor, and solar cell industries. The simultaneous removal of both gases with a single catalytic system offers significant operational and economic advantages:
1. Reduced Energy Consumption & Secondary Carbon Emissions
     Catalytic decomposition enables operation at temperatures of approximately 750 °C, significantly lower than conventional thermal treatment. This can reduce scrubber energy and fuel consumption by 30–50% or more, while also lowering associated secondary carbon emissions.
     2. Highly Efficient Simultaneous Treatment
With a decomposition efficiency of over 95% for both PFCs and N₂O, Purelyst® PFC-201 enables the simultaneous treatment of multiple greenhouse gases within a single scrubber system. This reduces process complexity, operating costs, and overall equipment footprint.