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Purelyst® PFC-101

Overview

Purelyst® PFC-101 온실가스, 제휴 시간(년), 지구온난화지수(GWP)에 관련된 표입니다.
Greenhouse gases Residence time (years) Global warming potential(GWP)
Carbon dioxide(CO2) 100~300 1
Methane(CH4) 12 25
Nitrous oxide(N2O) 114 298
Sulfur hexafluoride(SF6) 3,200 22,800
Hydrofluorocarbons(HFCs) 4.9 ~ 270 675 ~ 14,800
Perfluorocompunds(PFCs) 10,000 ~ 50,000 7,390 ~ 12,200

Perfluorinated compounds such as NF3, CF4, SF6 are emitted in low amounts, but contribute significantly to global warming, making it necessary to remove them from industrial processes

Usage

Purelyst® PFC-101 제품명, 제거대상, 반응메커니즘, 특징, 적용분야에 관련된 표
Product name Purelyst® PFC-101
Removal method
  • Perfluorinated compounds such as NF3, CF4, SF6
Response mechanisms
  • CF4 + 2H2O + Catalyst* ▶ CO2 + 4HF
  • SF6 + 3H2O + Catalyst* ▶ SO2 + 6HF
  • NF3 + H2O + Catalyst* ▶ a NO, b N2O, c NO2 + n HF
Characteristics
  • Thermal durability up to 850°C
  • Maintains catalytic performance even in the presence of high concentrations of HF and SO2
  • Minimizes generation of F compound by-products
  • Can be shaped into pellets or trilobe forms
Applicable fields
  • Semiconductor process
  • Display process

Specifications for bulk and honeycomb-shaped products

Purelyst® PFC-101 제품 명, 제거대상, 반응메커니즘, 특징, 적용분야에 관련된 표
Product name Purelyst® PFC-101
Form Pellet, Trilobe
Charge density(g/cm3) 0.70 ± 0.10
Compressive strength (N) characteristics > 30
BET(m2/g) > 150
Charge density(g/cm3) Below 3

Performance evaluation results

Categories, Condition, Unit 에 관련된 표
Categories Condition Unit
Type of catalyst 11mm Tri-lobe -
GHSV 1,600 h-1
Linear velocity 0.044 m/sec
Voulme of catalyst 90 cm3
Reaction temperature 500 ~ 800 ℃
Total flow rate 2,400 cm3/min
Concentration of CF4 2,000 ppm
Concentration of O2 2 %
H2O/CF4 molar ratio 25 -
Categories, Condition, Unit 에 관련된 표
Categories Condition Unit
Type of catalyst 10~16 mesh Granular type -
GHSV 1,600 h-1
Voulme of catalyst 39.2 cm3
Reaction temperature 750 ℃
Total flow rate 1,176 cm3/min
Concentration of CF4 6,040 ppm
Concentration of O2 21 %
H2O/CF4 molar ratio 25 -

Product image

  • Pellet type
  • Tri-lobe type
  • Honeycomb briquette type
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