Puresorb® TA-201 ~ 202

Puresorb® TA-201 ~ 202 제품명, 제거대상, 특징, 적용분야에 완련된 표
Product name	Puresorb® TA-201, 202
Targeted pollutants	Substitution adsorption through oxidation reactions Applicable to flammable or combustible gases such as SiH₄, BF₃, PH₃, PF₃
Characteristics	Stable and high adsorption performance Extensive on-site experience and design capabilities Can be applied in various forms, such as spherical, pellet, and 3H forms
Applicable fields	Semiconductor, display, solar cell, gas companies, etc.

Puresorb® AA-101 ~ 104 형태/크기(직경/길이, mm),충전밀도(g/cm3), 압축강도(N/시료), 적용가능 가스 관련된 표
Product	TA-201	TA-202
Product description	Moderate strength, relatively low charge density	High strength, high charge density
Applicable fields	SiH₄, BF₃, PH₃, PF₃	SiH₄, BF₃, PH₃, PF₃
Charge density(g/cm³)	0.6 ~ 0.8	0.8 ~ 1.0
Compressive strength(N)	15 or higher	25 or higher
Form and Size	3mm or 5mm Pellet	3mm or 5mm Pellet
Moisture(wt. %)	Below 2	Below 2