Adsorption test unit
R&D > Research Equipment
Adsorption of CH3OH, Cl2, HCl, NH3, SiH4, etc.
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Subject |
Content |
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Equipment |
Adsorption test unit |
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Gas control |
Mass flow controller |
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Temperature |
RT~300°C |
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Moisture control |
Antoine's saturator |
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Gas analysis |
CH3CHO, Cl2, HCl, NH3, SiH4 , etc. |